HORIBA PV-1000/PV-2000系列压电阀PV-2103MC
PV-1000/PV-2000系列压电阀由带有金属隔膜和金属密封圈的压电阀组成。当与压力传感器或流量传感器和比率控制单元（PCU 系列）结合使用时，可以构建压力控制或流量控制系统。
HORIBA PV-1000/PV-2000系列压电阀优点：
全金属结构，超洁净
流量范围广：1 CCM - 50 LM
高温型号可选（PV-1000S/2000S）
外部单元压力控制
PV-1202MC\PV-1502MC\PV-2103MC\PV-2203MC技术参数
PV-1000
Flow Range 1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv)
Flow Control Range 2 -100% F.S.
Valve Type normally open / close
Input Signal 0 - 5VDC
Responce less than 0.5 sec.
Operating Temperature 0 - 50 °C
Operating Diffential Pressure MAX. 300 kPa(a)(max,42psi)
Pressure Resistance 1MPa
Leak Integrity 5×10-12Pa•m3(He)
PV-2000
Flow Range 10/20 LM
Flow Control Range 2 -100% F.S.
Valve Type normally open / close
Input Signal 0 - 5VDC
Responce less than 0.5 sec.
Operating Temperature 0 - 50 °C
Operating Diffential Pressure MAX. 300 kPa(a)(max,42psi)
Pressure Resistance 1MPa
Leak Integrity 5×10-12Pa•m3(He)